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Custom Software
We have the ability to modify and add features to the steppers running Master Operating Programs (MOPs) versions
605.x through 7.x. These MOPs are tasks running under the RSX-11M+ DEC operating system. We can do customisation
upon request. Currently, we offer the following software which was
written to keep users out of the 'MODE' command so that they can't inadvertently make changes
that affect the operation of the stepper.
- CHUK.TSK - make changes to the current chuck size
- LCOR.TSK - make changes to the loading corrections
- AMOD.TSK - globally change user accounts to control access to MOP commands (mode, acnt, etc.)
Note : we have also extended the standard chuck size options to include non-standard wafer sizes, and parts of a wafer (e.g. 2inch wafer, 10mm square , 15mm square etc) with
corresponding automatic corrections to the wafer levelling points.
Sample Output
--- MOP Command Extension Ver 1.1 Jan 2005 (H&L Associates) ---
C - Change chuck size
L - Change loading offset correction
Q - Quit
Select command [C,L,Q] >> c
++ Chuck change V1.5 (c)H&L Associates Feb 2005 [6in]
.. Current chuck : 3 [AWL type : 6]
.. Valid sizes : 3,82,100,125,150,200
Enter chuck size >> 100
++ Chuck change V1.5 (c)H&L Associates Feb 2005 [6in]
.. Current chuck : 150 [AWL type : 6]
!! New chuck : 100
Select command >> l
++ LCO Loading correction V1.5 (c)H&L Associates Jan 2005 X+
.. Current loading correction(mm) x:0.00000
.. Valid codes : AWH MAN
Enter loading correction X(mm) >> 1.2
Enter loading correction Y(mm) >> 2.2
++ LCO Loading correction V1.5 (c)H&L Associates Jan 2005 X+
.. Current loading correction(mm) x:0.00000 y:0.00000
!! New loading corrections (mm) x:1.20000 x:2.20000
Select command [C,L,Q] >> q
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